Droplet-ejecting head, droplet-ejecting apparatus, and piezoelectric element
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United States of America Patent
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Sep 2, 2014
Grant Date -
Mar 31, 2011
app pub date -
Sep 28, 2010
filing date -
Sep 30, 2009
priority date (Note) -
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Abstract
A droplet-ejecting head including a substrate including a pressure chamber communicating with a nozzle hole and also a piezoelectric element that includes a lower electrode, a piezoelectric layer which is formed above the lower electrode, and an upper electrode formed above the piezoelectric element and that causes a change in pressure in a liquid contained in the pressure chamber. The piezoelectric layer includes a first piezoelectric sub-layer located on the lower electrode and a second piezoelectric sub-layer located between the first piezoelectric sub-layer and the upper electrode. The first piezoelectric sub-layer has a polarization axis predominantly directed in an in-plane direction of the first piezoelectric sub-layer. The second piezoelectric sub-layer is predominantly (100)-oriented in the pseudocubic coordinate system.
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