Shape measurement apparatus, and shape measurement method
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United States of America Patent
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Sep 2, 2014
Grant Date -
Feb 27, 2014
app pub date -
Aug 5, 2013
filing date -
Aug 24, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A shape measurement apparatus includes a distance measurement meter configured to emit and receive the beam in relation to the object; a beam deflection mechanism configured to deflect the beam from the distance measurement meter; and a control unit configured to determine at least one of a maximum beam deflection angle due to the beam deflection mechanism and the distance between a detected surface and the beam deflection mechanism when the beam is incident perpendicularly to the detected surface of the object, so that an error of a first measurement error that depends on a change in a spot diameter of the beam on the detected surface and a second measurement error that depends on an incidence angle on the detected surface of the beam is no more than a threshold value of a permitted error.
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Cited Art Landscape
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