Imprinting apparatus, imprinting method, and manufacturing method of uneven plate
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United States of America Patent
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Sep 9, 2014
Issued Date -
N/A
app pub date -
Sep 15, 2011
filing date -
Feb 15, 2011
priority date (Note) -
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Abstract
According to one embodiment, an imprinting apparatus includes an ejecting unit, a stage, a moving unit, and an observation unit. The ejecting unit ejects and drips a hardening resin material onto a substrate to be processed. The substrate to be processed is placed onto the stage. The moving unit relatively moves the ejecting unit and the stage. The observation unit observes the dripped hardening resin material and the pattern with the state in which the dripped hardening resin material and the pattern are overlaid on a plane, before the template is brought into contact with the hardening resin material.
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