Use of a target for spark evaporation, and method for producing a target suitable for said use
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United States of America Patent
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Sep 9, 2014
Grant Date -
Jun 16, 2011
app pub date -
Aug 10, 2009
filing date -
Aug 17, 2008
priority date (Note) -
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Abstract
The invention relates to a method for using a target for a coating process of metal oxide and/or metal nitride coatings by means of spark evaporation, wherein the target can be operated at a temperature that is higher than the melting point of the metal used in the target, and wherein the target is comprised of a metal whose oxides and/or nitrides are not electrically conducting. The invention further relates to the use of a target for producing metal oxide coatings and/or metal nitride coatings by means of spark evaporation, wherein the target has a matrix comprised of a metal, in which matrix non electrically conducting oxides and/or nitrides of the metal are embedded.
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