Electrical device including a functional element in a cavity
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United States of America Patent
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Sep 9, 2014
Grant Date -
Feb 7, 2013
app pub date -
Oct 9, 2012
filing date -
Jan 25, 2008
priority date (Note) -
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Abstract
A substrate includes a functional element. An insulating first film forms a cavity which stores the functional element, together with the substrate, and includes a plurality of through-holes. An insulating second film covers the plurality of through-holes, is formed on the first film, and has a gas permeability which is higher than that of the first film. An insulating third film is formed on the second film and has a gas permeability which is lower than the second film. An insulating fourth film is formed on the third film and has an elasticity which is larger than the third film.
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