Corrosion-resistant multilayer ceramic member

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United States of America Patent

PATENT NO 8829397
SERIAL NO

12285108

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Abstract

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The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

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Patent Owner(s)

  • SHIN-ETSU CHEMICAL CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kano, Shoji Gunma, JP 23 126
Kubota, Yoshihiro Gunma, JP 169 1708
Yamamura, Waichi Gunma, JP 34 100

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