Structure and method to form e-fuse with enhanced current crowding

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United States of America Patent

PATENT NO 8829645
APP PUB NO 20090309184A1
SERIAL NO

12137640

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Abstract

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An e-fuse structure and method has an anode; a fuse link (a first end of the fuse link is connected to the anode); a cathode (a second end of the fuse link opposite the first end is connected to the cathode); and a silicide layer on the fuse link. The silicide layer has a first silicide region adjacent the anode and a second silicide region adjacent the cathode. The second silicide region comprises an impurity not contained within the first silicide region. Further, the first silicide region is thinner than the second silicide region.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Deok-Kee Bedford Hills, US 93 1022
Ozcan, Ahmet S Pleasantville, US 94 775
Yang, Haining S Wappingers Falls, US 176 3892

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