Fine pitch guided vertical probe array having enclosed probe flexures

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United States of America Patent

PATENT NO 8829937
APP PUB NO 20120194212A1
SERIAL NO

12931260

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Abstract

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Probes suitable for use with densely packed fine-pitch 2-D contact arrays are provided by use of an electrically insulating guide plate in connection with vertical probes, where the vertical probes have probe flexures that are either vertically folded sections, or coils having a horizontal axis. Preferably, the probes are configured such that the probe flexures are inside the guide plate holes, and the parts of the probes extending past the guide plate are relatively rigid. This configuration alleviates problems associate with probe shorting, because the probe flexures are enclosed by the guide plate holes, and are therefore unable to come into contact with flexures from other probes during probing.

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Patent Owner(s)

  • FORMFACTOR, INC.;MICROPROBE, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kister, January Portola Valley, US 70 2036

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