Structure and fabrication of a microscale flow-rate/skin friction sensor

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United States of America Patent

PATENT NO 8833175
SERIAL NO

13133303

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A floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection.

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Patent Owner(s)

  • UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arnold, David P Gainesville, US 25 564
Chandrasekharan, Vijay Gainesville, US 1 8
Sells, Jeremy Gainesville, US 24 38
Sheplak, Mark Gainesville, US 22 254

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