Imprinting machine and device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8834144
APP PUB NO 20100148397A1
SERIAL NO

12710685

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kasumi, Kazuyuki Utsunomiya, JP 46 721
Kawakami, Eigo Utsunomiya, JP 50 1191
Nakamura, Takashi Edogawa-ku, JP 821 11199
Ota, Hirohisa Kawagoe, JP 19 243
Tokita, Toshinobu Yokohama, JP 79 1790

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Mar 16, 2026
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00