Ultra-miniaturized electron optical microcolumn
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United States of America Patent
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Sep 16, 2014
Grant Date -
Aug 14, 2014
app pub date -
Feb 13, 2014
filing date -
Feb 14, 2013
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Abstract
An ultra-miniaturized electron optical microcolumn is provided. The electron optical microcolumn includes an electron-emitting source emitting electrons using a field emission principle, an extraction electrode causing the emission of electrons from the electron-emitting source, a focusing electrode to which voltage is flexibly applied in response to a working distance to a target for regulating a focusing force of electron beams emitted from the electron-emitting source, an acceleration electrode accelerating electrons emitted by the extraction electrode, a limit electrode regulating an amount and a size of electron beams using electrons accelerated by the acceleration electrode, and a deflector deflecting electron beams towards the target.
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