Electronic devices including carbon nano-tube films having boron nitride-based liners, and methods of forming the same

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United States of America Patent

PATENT NO 8835892
APP PUB NO 20100108981A1
SERIAL NO

12608592

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Abstract

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Methods in accordance with this invention form a microelectronic structure by forming a carbon nano-tube (“CNT”) layer, and forming a boron nitride layer (“BN liner”) above the CNT layer, wherein the BN liner comprises: (1) a first portion disposed above and in contact with the CNT layer; and/or (2) a second portion disposed in and/or around one or more carbon nano-tubes in the CNT layer. Numerous other aspects are provided.

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Patent Owner(s)

  • SANDISK TECHNOLOGIES LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jayasekara, Wipul Pemsiri Los Gatos, US 44 816

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