Zone plate

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United States of America Patent

PATENT NO 8836917
APP PUB NO 20120105961A1
SERIAL NO

13347320

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A zone plate includes a plurality of consecutively arranged, adjacent, and alternating first and second regions. The first regions are arranged to be substantially transparent to a first predetermined wavelength of radiation and a second predetermined wavelength of radiation that is different from the first predetermined wavelength of radiation. The second regions are arranged to be substantially opaque, diffractive, or reflective to the first predetermined wavelength of radiation and substantially transparent to the second predetermined wavelength of radiation.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Soer, Wouter Anthon Nijmegen, NL 59 251
Van, Herpen Maarten Marinus Johannes Wilhelmus Heesch, NL 136 980

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