Prober for testing devices in a repeat structure on a substrate

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United States of America Patent

PATENT NO 8841932
SERIAL NO

13094604

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Abstract

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A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Giessmann, Sebastian Wildenhain, DE 15 12
Werner, Frank-Michael Dresden, DE 8 21
Zieger, Matthias Riesa, DE 4 14

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