Inspection tool and methodology for three dimensional voltage contrast inspection

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United States of America Patent

PATENT NO 8841933
SERIAL NO

12878089

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Abstract

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A system and method for improved voltage contrast inspection is disclosed. In one embodiment the temporal response to voltage contrast is considered to find an optimal acquisition time. In another embodiment, multiple optimal acquisition times are identified. The identified acquisition times are used in voltage contrast inspection of semiconductor fabrication, and are well-suited to SOI technology.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Patterson, Oliver D Hopewell Junction, US 30 1662

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