Position detection apparatus, imprint apparatus, and position detection method
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United States of America Patent
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Sep 23, 2014
Grant Date -
Dec 27, 2012
app pub date -
Jun 14, 2012
filing date -
Jun 21, 2011
priority date (Note) -
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Abstract
A position detection apparatus includes an illumination optical system for illuminating a first diffraction grating having periods in each of a first direction and a second direction different from the first direction, and a second diffraction grating having a period different from the period in the second direction of the first diffraction grating in the second direction, at an oblique incidence, and a detection optical system for detecting diffracted light from the first diffraction grating and the second diffraction grating, wherein a relative position of the first diffraction grating and the second diffraction grating is detected based on the detected diffracted light, and wherein the illumination optical system includes a plurality of light intensity distributions in the first direction except for on an optical axis of the detection optical system, in a pupil plane thereof.
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