Piezoelectric element, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus

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United States of America Patent

PATENT NO 8847471
APP PUB NO 20120062074A1
SERIAL NO

13227349

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Abstract

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A piezoelectric element includes a first electrode, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first and second multilayer composites each include a piezoelectric layer and a second electrode over the piezoelectric layer. The first electrode contains a metal that can react with chlorine, and has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composite.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hahiro, Hideki Shiojiri, JP 11 25

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