Liquid application device, liquid application method, and nanoimprint system
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United States of America Patent
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Nov 25, 2014
Grant Date -
May 9, 2013
app pub date -
Dec 28, 2012
filing date -
Dec 28, 2012
priority date (Note) -
Withdrawn
status (Latency Note)
Importance
Abstract
A liquid application device includes: a liquid discharge head having a structure in which nozzles for performing droplet ejection of a functional liquid onto a substrate are aligned in a row in a predetermined direction, and including liquid chambers connected to the nozzles respectively and piezoelectric elements which are provided correspondingly to the liquid chambers and serve to pressurize the liquid in the liquid chambers; a relative movement unit for causing relative movement between the substrate and the liquid discharge head; and a droplet ejection control unit for operating the piezoelectric elements so as to cause the liquid to land discretely on the substrate, and controlling operation of the piezoelectric elements according to each of groups formed by grouping the nozzles correspondingly to the structure of the liquid discharge head.
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