Centrifuge with vacuum pump configured of auxiliary vacuum pump and oil diffusion pump
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United States of America Patent
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Oct 7, 2014
Grant Date -
Jul 18, 2013
app pub date -
Jan 11, 2013
filing date -
Jan 18, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A centrifuge includes a vacuum pump machine configured of an auxiliary vacuum pump and an oil diffusion pump for exhausting gas inside a rotary chamber to outside, in which a rotor rotates at high speed. In the centrifuge, a thermistor for detecting a temperature of oil and an oil surface inside a boiler of the oil diffusion pump is provided inside the boiler, and power of a heater is adjusted with the temperature detected by the thermistor, so that a degree of vacuum inside the rotary chamber is stably reduced from atmospheric pressure to a high vacuum state. Besides, when the heater does not heat, a current is carried through the thermistor for self-heating, and it is determined from variation in a resistance value whether the oil exists or not at a position at which the thermistor 8 is placed.
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