Dense arrays and charge storage devices

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United States of America Patent

PATENT NO 8853765
APP PUB NO 20140225180A1
SERIAL NO

14227644

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Abstract

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There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

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Patent Owner(s)

  • SANDISK TECHNOLOGIES LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cleeves, James M Redwood City, US 131 7723
Farmwald, Paul Michael Portola Valley, US 17 2696
Johnson, Mark G Los Altos, US 64 7623
Kouznetsov, Igor G Santa Clara, US 32 819
Lee, Thomas H Cupertino, US 90 7361
Subramanian, Vivek Redwood City, US 100 6748

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