Integrated device of the type comprising at least a microfluidic system and further circuitry and corresponding integration process

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United States of America Patent

PATENT NO 8853800
APP PUB NO 20120007150A1
SERIAL NO

13178076

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Abstract

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An embodiment relates to a device integrated on a semiconductor substrate of a type comprising at least one first portion for the integration of at least one microfluidic system, and a second portion for the integration of an additional circuitry. The microfluidic system comprises at least one cavity realized in a containment layer of the integrated device closed on top by at least one portion of a polysilicon layer, this polysilicon layer being a thin layer shared by the additional circuitry and the closing portion of the cavity realizing a piezoresistive membrane for the microfluidic system.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando′, Bruno Aci Catena, IT 1 0
Baglio, Salvatore San Giovanni La Punta, IT 12 70
Caligiore, Claudia Giarre, IT 7 49
Leonardi, Salvatore Aci S. Antonio, IT 49 264

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