Microelectromechanical system with reduced speckle contrast
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United States of America Patent
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Oct 7, 2014
Grant Date -
Aug 11, 2011
app pub date -
Feb 11, 2011
filing date -
Feb 11, 2010
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Abstract
The present disclosure describes, among other things, a reduced speckle contrast microelectromechanical system. One exemplary embodiment includes micromechanical structures configured to form a uniform reflective surface on a substrate, an elastic substance coupled to the substrate, and an energy source that applies a voltage to the elastic substance to alter the shape of the surface of the substrate, for example, by about 10% to about 25% of a wavelength of light projected onto the substrate at a frequency of at least 60 Hz. Another exemplary embodiment includes micromechanical structures formed on a surface of a substrate, a reflective diaphragm connected to the substrate, an elastic substance coupled to the diaphragm, and an energy source that applies a voltage to the elastic substance to vibrate the diaphragm at a frequency of at least 60 Hz.
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