Adhesion enhancement of thin film PZT structure
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United States of America Patent
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Oct 7, 2014
Grant Date -
N/A
app pub date -
May 3, 2013
filing date -
May 3, 2013
priority date (Note) -
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Abstract
A microactuator, for example for a disc drive, comprising a substrate, a sandwich structure on the substrate, and a passivation layer over the substrate and the sandwich structure. The sandwich structure has a bottom electrode formed from noble metal, a piezoelectric layer, and a top electrode formed from noble metal. The microactuator further has one or both of a bottom adhesion layer present between the bottom electrode and the passivation layer, and a top adhesion layer present between the top electrode and the passivation layer. That is, the microactuator may have only the bottom adhesion layer, only the top adhesion layer, or both the bottom adhesion layer and the top adhesion layer.
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