Injector for a vacuum evaporation source

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United States of America Patent

PATENT NO 8858714
APP PUB NO 20120160171A1
SERIAL NO

12985524

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Abstract

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An injector for a vacuum evaporation source includes an injection duct (1) having a longitudinal axis (11) and an inlet port (2) able to be connected to a vacuum evaporation source, and at least one nozzle (3) for diffusing a vaporized material, the nozzle (3) having a lateral face (4), and an upper face (5). The nozzle (3) includes a main channel (6) emerging outside the injection duct (1) and at least a lateral feeding channel (7) connecting the interior of the injection duct (1) to the main channel (6). The lateral feeding channel (7) has a lateral orifice (8) emerging inside the injection duct (1) through the lateral face (4) of the nozzle (3) for avoiding the clogging of the nozzle (3) by oxidized materials.

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Patent Owner(s)

Patent OwnerAddress
RIBER95870 BEZONS

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grange, Olivier Saint-Cloud, FR 3 17
Guyaux, Jean-Louis Chilly Mazarin, FR 8 15
Stemmelen, Franck Vaureal, FR 8 8

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