Charged-particle microscope

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8859962
APP PUB NO 20140197313A1
SERIAL NO

14215209

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Abstract

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A charged-particle-beam device is characterized in having a control value for an aligner coil (29) being determined by: a coil current and an electrode applied-voltage at a control value for objectives (30, 31), which is an electromagnetic-field superposition lens; a control value for image-shift coils (27, 28); and the acceleration voltage of the charged-particle-beam. By doing this, it has become possible to avoid image disturbances that occur on images to be displayed at boundaries between charged areas and non-charged areas, and provide a charged-particle-beam device that obtains clear images without any unevenness in brightness.

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Patent Owner(s)

  • HITACHI HIGH-TECHNOLOGIES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asao, Kazunari Tokai, JP 14 93
Fukuda, Muneyuki Kokubunji, JP 102 1072
Kitsuki, Hirohiko Hitachinaka, JP 12 33
Shojo, Tomoyasu Saitama, JP 19 108
Takahashi, Noritsugu Kokubunji, JP 30 198
Yano, Manabu Hitachiomiya, JP 16 172

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