Resistance random access memory device

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United States of America Patent

PATENT NO 8860182
APP PUB NO 20140284541A1
SERIAL NO

14020345

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Abstract

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A resistance random access memory device according to an embodiment includes a first electrode, a second electrode and a variable resistance film provided between the first electrode and the second electrode. The second electrode includes material selected from the group consisting of silver, copper, zinc, gold, titanium, nickel, cobalt, tantalum, aluminum, and bismuth, alloys thereof, and silicides thereof. The variable resistance film includes silicon oxynitride. The variable resistance film includes a first resistance change layer having a first nitrogen concentration and a second resistance change layer having a second nitrogen concentration lower than the first nitrogen concentration.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Shosuke Kanagawa-ken, JP 67 931
Miyagawa, Hidenori Kanagawa-ken, JP 31 199
Takaishi, Riichiro Kanagawa-ken, JP 6 47

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