Method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index
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United States of America Patent
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Oct 21, 2014
Grant Date -
Sep 18, 2008
app pub date -
Mar 4, 2008
filing date -
Mar 13, 2007
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Abstract
A method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index are provided. The sputter-deposition system includes a plurality of target cathodes, each of which comprises a target material having a different composition, that are powered by a single DC power supply. The plurality of target cathodes are cosputtered to deposit a layer composed of a mixture of materials on a substrate. The composite refractive index of the layer is controlled by adjusting an operating parameter of the plurality of target cathodes. Suitable operating parameters include cathode power, cathode voltage, cathode current, an angle between a cathode support and the substrate, and a flow rate of a reactive gas.
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