Substrate processing apparatus and substrate processing method
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United States of America Patent
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Oct 21, 2014
Grant Date -
Feb 13, 2014
app pub date -
Aug 1, 2013
filing date -
Aug 10, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is a substrate processing apparatus in which flexibility of disposing a device configured to determine a holding state of a substrate and the flexibility of timing of determining the holding state are enhanced. The substrate processing apparatus includes a light projector configured to radiate detection light toward a region where a substrate may exist when the substrate is held by a substrate holding member and a light receiver configured to receive the detection light radiated from the light projector. A light path of the detection light from the light projector toward the light receiver passes a substrate surrounding member installed around the substrate held by the substrate holding member. The detection light penetrates the substrate surrounding member and has a wavelength which does not penetrate the substrate.
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