Biological and chemical sensors

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United States of America Patent

PATENT NO 8871549
APP PUB NO 20140225166A1
SERIAL NO

13767024

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Device structures, fabrication methods, and design structures for a biological and chemical sensor used to detect a property of a substance. The device structure includes a drain and a source of a field effect transistor formed at a frontside of a substrate. A sensing layer is formed at a backside of the substrate. The sensing layer is configured to receive the substance.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ellis-Monaghan, John J Grand Isle, US 254 2527
Gambino, Jeffrey P Westford, US 531 7321
Liu, Derrick Winooski, US 26 127

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