Wafer test cassette system
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United States of America Patent
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Oct 28, 2014
Issued Date -
N/A
app pub date -
Dec 27, 2010
filing date -
Dec 31, 2009
priority date (Note) -
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status (Latency Note)
Importance
Abstract
Wafer cassette systems and methods of using wafer cassette systems. A wafer cassette system can include a base and a probe card assembly. The base and the probe card assembly can each include complementary interlocking alignment elements. The alignment elements can constrain relative movement of the base and probe card assembly in directions parallel to a wafer receiving surface of the base, while permitting relative movement in a direction perpendicular to the receiving surface.
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Family
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Cited Art Landscape
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