Cryopump network
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United States of America Patent
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Oct 28, 2014
Grant Date -
Jan 27, 2011
app pub date -
Jan 22, 2009
filing date -
Jan 22, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
A vacuum network control system includes a plurality of nodes configured for control over operational processes of the system. The plural nodes are configured, in a network ring or other topology, as a selectable master node for controlling the operational processes. Control can be distributed among, and passed between, each of the nodes. Each node on the network monitors adjacent network connectors to detect a fault in the network. In response to a detected fault, a disconnect is mapped to the fault, and the network topology is reconfigured for continued communication among the nodes and with external devices.
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