Processing of nanostructured devices using microfabrication techniques

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United States of America Patent

PATENT NO 8877636
SERIAL NO

13036887

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Abstract

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Systems and methods that incorporate nanostructures into microdevices are discussed herein. These systems and methods can allow for standard microfabrication techniques to be extended to the field of nanotechnology. Sensors incorporating nanostructures can be fabricated as described herein, and can be used to reliably detect a range of gases with high response.

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Patent Owner(s)

  • UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF THE NATIONAL AERONAUTICS AND SPACE ADMINISTRATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berger, Gordon M Akron, US 1 1
Evans, Laura J Fairview Park, US 1 1
Hunter, Gary W Oberlin, US 19 98
Kulis, Michael H Shaker Heights, US 1 1
Vander, Wal Randall L State College, US 2 1
Xu, Jennifer C Olmsted Township, US 7 29

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