Imager microlens structure having interfacial region for adhesion of protective layer

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United States of America Patent

PATENT NO 8878326
SERIAL NO

13759649

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Abstract

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Structures and design structures for improved adhesion of protective layers of imager microlens structures are disclosed. A method of fabricating a semiconductor structure includes forming an interfacial region between a microlens and a protective oxide layer. The interfacial region has a lower concentration of oxygen than the protective oxide layer.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cooney,, III Edward C Jericho, US 42 285
Gambino, Jeffrey P Westford, US 531 7330
Leidy, Robert K Burlington, US 100 1694
Musante, Charles F South Burlington, US 36 319
Twombly, John G Essex Junction, US 11 187

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