Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same

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United States of America Patent

PATENT NO 8882976
SERIAL NO

12481166

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Abstract

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A magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same. The magnetron unit moving apparatus includes a magnetron unit disposed adjacent to a target, to generate a specific magnetic field, and a movement unit to space the magnetron unit and the target apart such that a strength of a magnetic field generated over the target is within a predetermined reference strength range. It is possible to space the target and the magnetron unit apart so as to prevent the target from being magnetized when a process is not performed.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chung, Yun-Mo Yongin, KR 99 1312
Hong, Jong-Won Yongin, KR 57 1252
Jeong, Min-Jae Yongin, KR 48 1033
Kang, Eu-Gene Yongin, KR 24 948
Lee, Ki-Yong Yongin, KR 138 1608
Na, Heung-Yeol Yongin, KR 40 1050

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