Impedance matching apparatus

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United States of America Patent

PATENT NO 8884520
APP PUB NO 20120306367A1
SERIAL NO

13571167

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Abstract

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Provided is an impedance matching apparatus for matching impedance to a plasma load. The impedance matching apparatus includes a first frequency impedance matching circuit unit that transfers an output of a first frequency RF power source unit, operating at a first frequency, to the plasma load; and a second frequency impedance matching circuit unit that transfers an output of a second frequency RF power source unit, operating at a second frequency higher than the first frequency, to the plasma load. The first frequency impedance matching circuit unit includes a T-type matching circuit, and the second frequency impedance matching circuit unit includes a standard L-type matching circuit or Π-type matching circuit.

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Patent Owner(s)

Patent OwnerAddress
MKS KOREA LTDGIHEUNG-GU YONGIN-SI GYEONGGI-DO 17086

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Jae Hyun Daejeon, KR 259 2059
Lee, Sang Won Daejeon, KR 216 1191
Lee, Yong Gwan Daejeon, KR 2 10

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