Material evaporation chamber with differential vacuum pumping
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United States of America Patent
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Nov 25, 2014
Grant Date -
Sep 28, 2006
app pub date -
Jun 18, 2003
filing date -
Jun 18, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
The invention concerns a material evaporation chamber including a vacuum chamber (10), a first pumping unit (13) to pump said chamber and sources of material. According to the invention, a wall (23) liable to provide total or partial vacuum tightness, delineates within this chamber a first volume (25) and a second volume (22). Certain sources of material (17) having a main axis (18) are placed in the second volume (22). This second volume (22) is pumped by a second pumping unit (24). The wall (23) includes recesses (26) which are each centered on the main axis (18) of one of the sources of material (17). The evaporation chamber also comprises means (27) for plugging or clearing each of said recesses (26), said means (27) being controlled individually to protect the sources of material (17) having a main axis (18) unused.
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