System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing

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United States of America Patent

PATENT NO 8895923
SERIAL NO

14083438

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Abstract

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A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.

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Patent Owner(s)

  • DCG SYSTEMS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berkmyre, Mike Allen, US 7 32
Pryadkin, Sergiy Plano, US 9 54
Sanders, John Coppell, US 37 279
Stallcup, Richard Frisco, US 6 29
Ukraintsev, Vladimir A Allen, US 11 40

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