Filament for electron source

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United States of America Patent

PATENT NO 8896195
SERIAL NO

12909745

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Abstract

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This invention relates to a filament for electron emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source. Embodiments of the present invention discloses method with which a Re (Rhenium) is used as heat source such that vibration issue of prior tungsten filament can be depressed.

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Patent Owner(s)

  • HERMES MICROVISION, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dou, Juying San Jose, US 18 139

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