Accoustic resonator having multiple lateral features

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United States of America Patent

PATENT NO 8896395
SERIAL NO

13232334

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Abstract

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A thin film bulk acoustic resonator (FBAR) includes a first electrode stacked on a substrate over a cavity, a piezoelectric layer stacked on the first electrode, and a second electrode stacked on the piezoelectric layer. Multiple lateral features are formed on a surface of the second electrode, the lateral features including multiple stepped structures.

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Patent Owner(s)

  • AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burak, Dariusz Fort Collins, US 75 1733
Feng, Chris Fort Collins, US 41 1251
Nikkel, Phil Loveland, US 51 1511

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