Tubular target and production method
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United States of America Patent
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Dec 2, 2014
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N/A
app pub date -
Dec 2, 2011
filing date -
Oct 14, 2005
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Abstract
A tubular target is formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion and it is formed with walls having a wall thickness that increases towards the ends of the tube. The molybdenum tube has a backing tube of titanium or titanium alloy that is attached inside with a material bond connection. Alternatively, the backing tube is formed of austenitic steel or a copper alloy.
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