Slurry composition and method of fabricating damascene structure using the same

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United States of America Patent

PATENT NO 8901001
APP PUB NO 20100255681A1
SERIAL NO

12546688

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Abstract

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A slurry composition has an amount of 100% and includes abrasives, an acid-base pH adjustor, an oxidant and water. A content of the abrasives is 10 wt % to 40 wt %, and a polydisperse index of the abrasives sizes is greater than 1.8. A content of the acid-base pH adjustor is 0.01 wt % to 10 wt %. A content of the oxidant is 0.01 wt % to 10 wt %. A remaining portion of the slurry composition is water.

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Patent Owner(s)

Patent OwnerAddress
FERRO CORPORATION6060 PARKLAND BOULEVARD SUITE 250 MAYFIELD HEIGHTS OH 44124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Song-Yuan Chiayi County, TW 17 105
Lu, Ming-Hui Taipei, TW 10 36
Shen, Po-Yuan Taoyuan County, TW 10 43
Tsai, Wen-Tsai Hsinchu County, TW 24 53

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