Graphene pressure sensors

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United States of America Patent

PATENT NO 8901680
SERIAL NO

13445029

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Abstract

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Semiconductor nano pressure sensor devices having graphene membrane suspended over cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cai, Jin Cortlandt Manor, US 131 1823
Wu, Yanqing Ossining, US 14 572
Zhu, Wenjuan Fishkill, US 26 337

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