High efficiency solar cells fabricated by inexpensive PECVD

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United States of America Patent

PATENT NO 8901695
SERIAL NO

13544415

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Abstract

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A photovoltaic device includes one or more layers of a photovoltaic stack formed on a substrate by employing a high deposition rate plasma enhanced chemical vapor deposition (HDR PECVD) process. Contacts are formed on the photovoltaic stack to provide a photovoltaic cell. Reduced defect zones are disposed adjacent to contact regions in portions of the photovoltaic cell and are formed by an anneal configured to improve overall performance.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fogel, Keith E Hopewell Junction, US 270 4155
Hong, Augustin J White Plains, US 63 990
Kim, Jeehwan Los Angeles, US 246 1233
Sadana, Devendra K Pleasantville, US 897 9950

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