Corrosion-resistant CMP conditioning tools and methods for making and using same

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United States of America Patent

PATENT NO 8905823
SERIAL NO

12791391

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Abstract

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An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.

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Patent Owner(s)

  • SAINT-GOBAIN ABRASIFS;SAINT-GOBAIN ABRASIVES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dinh-Ngoc, Charles Holliston, US 5 109
Hwang, Taewook Acton, US 11 164
Puthanangady, Thomas K Shrewsbury, US 1 38
Ramanath, Srinivasan Holden, US 63 1197
Schulz, Eric M Worcester, US 6 110
Vedantham, Ramanujam Worcester, US 22 437
Wu, Jianhui Ashland, US 38 211

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