Corrosion-resistant CMP conditioning tools and methods for making and using same
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United States of America Patent
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Dec 9, 2014
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app pub date -
Jun 1, 2010
filing date -
Jun 2, 2009
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Abstract
An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.
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