Fluid recirculation system for use in vapor phase particle production system

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United States of America Patent

PATENT NO 8906316
SERIAL NO

13907667

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Abstract

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A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.

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Patent Owner(s)

  • SDCMATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Layman, Frederick P Carefree, US 22 1298

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