Microelectronic cleaning and arc remover compositions

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United States of America Patent

PATENT NO 8906838
SERIAL NO

10515372

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Abstract

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Cleaning compositions suitable for cleaning microelectronic structures having silicon dioxide, low-k or high-k di-electrics and copper or aluminum metallizations contain a polar organic solvent selected from amides, sulfones, sulfolenes, selenones and saturated alcohols and a strong alkaline base.

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Patent Owner(s)

Patent OwnerAddress
AVANTOR PERFORMANCE MATERIALS LLC3477 CORPORATE PARKWAY SUITE 200 CENTER VALLEY PA 18034

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Chien-Pin Sherman Basking Ridge, US 10 158

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