Method to calculate transmission cross coefficient in an exposure apparatus
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United States of America Patent
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Dec 9, 2014
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Sep 29, 2011
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Oct 3, 2007
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Abstract
A computer-implemented calculation method of calculating a transmission cross coefficient in an apparatus which projects an image of an object onto an image plane via a projection optical system includes: a division step of dividing an effective light source formed on a pupil plane of the projection optical system into a plurality of point sources, a defining step of defining a matrix by arranging each of the plurality of pupil functions generated in the generation step in each row or each column of the matrix, and a calculation step of calculating the transmission cross coefficient based on the matrix defined in the defining step.
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