Device and method for polarimetric measurement with microscopic resolution, polarimetry accessory for a microscope, ellipsomicroscope and ellipsometric contrast microscope
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United States of America Patent
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Dec 9, 2014
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Jul 18, 2011
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Jul 19, 2010
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Abstract
A polarimetric measurement device and method with microscopic resolution include a polarization conversion device to modify the polarization of a beam so as to switch from a spatially uniform distribution to a distribution that is cylindrically symmetric about the optical axis, and vice versa. The conversion device is positioned on the axis of a focusing objective for focusing the cylindrically symmetric polarized beam onto the surface of a sample to be measured. The device may be incorporated into a microellipsometer, or an interference contrast microscope, or used as a polarimetric accessory for a microscope.
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