Method for measurement of a power device

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United States of America Patent

PATENT NO 8922229
SERIAL NO

13380484

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Importance

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Abstract

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A method is disclosed for the measurement of a power device in a prober, which serves the examination and testing of such components. In the process, a power device is held by a chuck, and at least one electric probe is held by a probe holder, and optionally, the power device or the probe is positioned each relative to the other using a positioning device with an electrical drive, and contacts the power device. At the same time, an electrical connection remains between the probe to a signal unit with which a power signal is sent out or received, is blocked and only unblocked when it is determined that the contact between probe 26 and contact area is established.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirschfeld, Botho Dresden, DE 8 37
Kanev, Stojan Thiendorf OT Sacka, DE 44 174

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