Interconnect structures and methods of manufacturing of interconnect structures

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United States of America Patent

PATENT NO 8927421
APP PUB NO 20130244424A1
SERIAL NO

13886836

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Abstract

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Interconnect structures and methods of manufacturing the same are disclosed herein. The method includes forming a barrier layer within a structure and forming an alloy metal on the barrier layer. The method further includes forming a pure metal on the alloy metal, and reflowing the pure metal such that the pure metal migrates to a bottom of the structure, while the alloy metal prevents exposure of the barrier layer. The method further includes completely filling in the structure with additional metal.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Edelstein, Daniel C White Plains, US 301 6007
Nogami, Takeshi Schenectady, US 231 4159

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